Les coussins sont la principale protection placée à l'intérieur des canisters et absorbent les chocks extérieurs et les mouvements internes de la pile de wafers.
Ils sont compatibles avec des wafers de 4 ", 5", 6 ", 8" et 12 ", et existent en différentes épaisseurs: 3mm, 5mm et 6mm.
Leur structure multicouches améliore leurs performances mécaniques et offre une qualité de pureté extrême. Un noyau de PE épais est laminé entre 2 films PE rigides des deux côtés.
Achilles propose ces coussins selon 2 caractéristiques:
Coussins multi-couches antistatiques:
Coussins conducteurs multi-couches:
Protos Cushion Type PEAS (highly clean type)
Part Number | MA-4PEAS-1/3/5/6/10 (for 4 inch) |
---|---|
MA-5PEAS-1/3/5/6/10 (for 5 inch) | MA-5PEAS-1/3/5/6/10 (for 5 inch) |
MA-6PEAS-1/3/5/6/10 (for 6 inch) | MA-6PEAS-1/3/5/6/10 (for 6 inch) |
MA-8PEAS-1/3/5/6/10 (for 8 inch) | MA-8PEAS-1/3/5/6/10 (for 8 inch) |
MA-12PEAS-1/3/5/6/10 (for 12 inch) | MA-12PEAS-1/3/5/6/10 (for 12 inch) |
Feature | Stable antistatic perfomance |
Cleanliness(Independent foaming/Surface film lamination) | Cleanliness(Independent foaming/Surface film lamination) |
Excellent impact absorption | Excellent impact absorption |
Surface Resistance Value | < 1.0×1012Ω |
Standard | Available with 5 cushioning thicknesses: 1mm, 3mm, 5mm, 6mm, 10mm |
Material | Polyethylene cushion laminated by Polyethylene film |
Configuration | Antistatic multi-layer cushion |
Protos Cushion Type PU
Part Number | MA-4U-5/10/15/20 (for 4 inch) |
---|---|
MA-5U-5/10/15/20 (for 5 inch) | MA-5U-5/10/15/20 (for 5 inch) |
MA-6U-5/10/15/20 (for 6 inch) | MA-6U-5/10/15/20 (for 6 inch) |
MA-8U-5/10/15/20 (for 8 inch) | MA-8U-5/10/15/20 (for 8 inch) |
MA-12U-5/10/15/20 (for 12 inch) | MA-12U-5/10/15/20 (for 12 inch) |
Feature | Stable antistatic perfomance |
Low cost | Low cost |
Excellent impact absorption | Excellent impact absorption |
Surface Resistance Value | < 1.0×1011Ω |
Standard | Available with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm |
Material | Anti-Static Polyurethane |
Configuration | Antistatic single layer cushion |
Protos cushion Type PESD
Part Number | MA-4PESD-1/3/5/10 (for 4 inch) |
---|---|
MA-5PESD-1/3/5/10(for 5 inch) | MA-5PESD-1/3/5/10(for 5 inch) |
MA-6PESD-1/3/5/10(for 6 inch) | MA-6PESD-1/3/5/10(for 6 inch) |
MA-8PESD-1/3/5/10(for 8 inch) | MA-8PESD-1/3/5/10(for 8 inch) |
MA-12PESD-1/3/5/10(for 12 inch) | MA-12PESD-1/3/5/10(for 12 inch) |
Feature | Stable conductive performance |
Cleanliness(Independent foaming) | Cleanliness(Independent foaming) |
Excellent impact absorption | Excellent impact absorption |
Surface Resistant Value | <1.0×108Ω |
Standard | Available with 4 cushioning thicknesses: 1mm, 3mm, 5mm, 10mm |
Material | Conductive Polyethylene |
Configuration | Conductive single-layer cushion |
Protos Cushion Type PEST (highly clean type)
Part number | MA-4PEST-1/3/5/6/10 (for 4 inch) |
---|---|
MA-5PEST-1/3/5/6/10 (for 5 inch) | MA-5PEST-1/3/5/6/10 (for 5 inch) |
MA-6PEST-1/3/5/6/10 (for 6 inch) | MA-6PEST-1/3/5/6/10 (for 6 inch) |
MA-8PEST-1/3/5/6/10 (for 8 inch) | MA-8PEST-1/3/5/6/10 (for 8 inch) |
MA-12PEST-1/3/5/6/10 (for 12 inch) | MA-12PEST-1/3/5/6/10 (for 12 inch) |
Feature | Stable conductive perfomance |
Cleanliness(Independent foaming/Surface film lamination) | Cleanliness(Independent foaming/Surface film lamination) |
Excellent impact absorption | Excellent impact absorption |
Surface Resistance Value | < 1.0×108Ω |
Standard | Available with 5 cushioning thicknesses: 1mm, 3mm, 5mm, 6mm, 10mm |
Material | Polyethylene foam laminated by Polyethylene film |
Configuration | Conductive multi-layer cushion |