Solarius - Atlas

The Atlas 3D metrology tool is a modular surface measurement system for quality assurance and process control. Depending on specific needs, different types of 3D sensor technologies can be configured, making it a flexibel tool that allows accurate results at a broad variety of 3D measuring requirements, materials and geometries. Its software supports automation and efficiency in a production environment. Interferometric 3D sensors allow high speed measurements with up to 80,000 points in as few as 130 milliseconds at lateral resolutions down to 4 µm.

Key Features

• Customized recipes, easy to automate
• Ultra fast measurements
• Wide variety of sensor selections
• Large lateral measurement range
• Flexible data analysis tools

Sensor Types

• Chromatic confocal point sensors
• Chromatic confocal line sensors
• White light interferometric sensors
• Line triangulation sensors

Using sensors with point confocal, line confocal, interferometric or line triangulation technology, its height resolution ranges from 1 nm to 200 µm. The Atlas software solution combines two software tools: a measurement recipe creation tool and a flexible analysis tool. This unique combination is ideal for applications in research and development, failure analysis and low volume semi-automated measurement.