The Atlas 3D metrology tool is a modular surface measurement system for quality assurance and process control. Depending on specific needs, different types of 3D sensor technologies can be configured, making it a flexibel tool that allows accurate results at a broad variety of 3D measuring requirements, materials and geometries. Its software supports automation and efficiency in a production environment. Interferometric 3D sensors allow high speed measurements with up to 80,000 points in as few as 130 milliseconds at lateral resolutions down to 4 µm.
Using sensors with point confocal, line confocal, interferometric or line triangulation technology, its height resolution ranges from 1 nm to 200 µm. The Atlas software solution combines two software tools: a measurement recipe creation tool and a flexible analysis tool. This unique combination is ideal for applications in research and development, failure analysis and low volume semi-automated measurement.
Lateral Working Range | up to 400 mm x 400 mm | |
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Vertical Working Range | 100 µm to 80 mm | |
Lateral Resoultion | 1 µm up | |
Vertical Resolution | 1 nm up | |
For further details, please refer to enclosed brochure. |