ADT - Dicing Peripheral

Available models

Water Recycling Systems AR 927

Specifications	Value
Flow capacity	<20 L/min
Supply pressure	<5 bar
Dimensions (W x D x H)	620 x 1280 x 1720 mm³
Air pressure	6-8 bar

Designed for closed-loop, uniform supply of cutting water. It recycles drain water thru filtering, cooling and pumping to maintain required purification, temperature and flow levels for optimized dicing, cost saving and environment care.

Wafer Cleaner 997/997L

Specifications	997	997L
Max workpiece size	Ø 200 (8”) min	Ø 300 (12”) min
Spinner velocity range	50-3,000 rpm	50-2,000 rpm
Dimensions (W x D x H)	410 x 625 x 946 mm³	502 x 809 x 946 mm³
Weight	120 Kg	200 Kg

Designed for after-dicing workpiece cleaning and drying. Equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements.

Semi Auto Wafer Mounter 967/967L

Specifications	967	967L
Supported tapes	Dicing Blue-tapes / UV tapes	Dicing Blue-tapes / UV tapes
Max Workpiece size	Ø 200 (8”) mm	Ø 300 (12”) mm
Dimensions (W x D x H)	655 x 590 x 560 mm³	791 x 706 x 557 mm³
Air pressure	6-8 bar	6-8 bar

Designed for quality, hands-free mounting of workpieces on tapes.
It features fast, consistent, precise and economic mounting at an exceptional cost-performance.

Manual Wafter Mounter 996/996L

Specifications	996-8"	996-12"
Max workpiece size	Ø 200 (8”) mm	Ø 300 (12”) mm
Temp control chuck heater	<65 °c	<65 °c
Dimensions (W x D x H)	420 x 860 x 370 mm³	550 x 1000 x 310 mm³
Air pressure	45 bar	60 bar

Designed for manual mounting of workpieces on tapes. Supporting various types of dicing tapes and standard frames. Can be customized for multiple substrates (multi-panel) and irregular frames.

UV Curing Systems 995/995L

Specifications	995-8"	995-12"
Max. frame Diameter	300 mm	400 mm
Exposure area	250 x 250 mm²	Ø430 mm²
Dimensions (W x D x H)	510 x 450 x 120 mm³	645 x 526 x 180 mm³
Weight	20 Kg	30 Kg

Designed for after dicing UV tape curing to reduce the adhesive strength for ease of workpiece removal.

Spindle Chiller 937-A

Specifications	Value
Temperature range	8-35 °c
Stability	±0.1 °c
Dimensions (W x D x H)	526 x 360 x 555 mm³

Designed for closed-loop supply of spindle cooling water. It maintains stable, temperature-controlled water; an important factor for achieving high dicing accuracy and quality.

C02 Injector 947

Specifications	Value
Resistivity setting range	0.1-1 MΩ/cm
Water capacity*	3-10 L/min
Dimensions (W x D x H)	190 x 446 x 365 mm³
Weight	6-8 Kg

Designed for decreasing the resistivity of deionized (DI) water to a predefined level. Aimed at preventing particle adhesion and damage caused by static discharge during the dicing process.