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Nordson Electronics Solutions - Automated Plasma Treatment System - FlexTRAK® SHS

Industry-Leading Throughput and Reliability

Built upon Nordson Electronics Solutions' patented plasma technology, the FlexTRAK®-SHS is our latest fully automated plasma system incorporating a high-capacity F3-S chamber, to provide high uniformity and increased productivity. The chamber architecture remains the same as the smaller FlexTRAK platform, providing a seamless transition between chambers as production demands more capacity.

 

Key Applications

  • Pre-wire bond plasma treatment on semiconductor package substrates and lead frames
  • Pre-underfill plasma treatment on flip chip packages 
  • Pre-mold plasma treatment on semiconductor package substrates and lead frames
  • Plasma treatment of semiconductor package substrates and lead frames for improved adhesion 
  • Removal/reduction of oxidation on lead frame

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Technical Specification

W x D x H – Footprint 2314 x 1935 x 1787 mm (2293 H mm with light tower)
91.1 x 76.2 x 70.5 in (90.3 H in with light tower)
Net Weight 1305 kg (2,871 lbs)
Chamber Volume F3-S chamber: 9.6 liters (585 in³)
F3 chamber: 5.5 liters (338 in³)
Powered Electrode Dimensions W x D F3-S chamber: 305 x 610 mm (12 x 24 in)
F3 chamber: 305 x 305 mm (12 x 12 in)
RF Power: Standard Wattage F3-S chamber: 1000 W
F3 chamber: 600 W
RF Power: Frequency 13.56 MHz
Gas Control: Maximum Number of MFCs 4

For further details, please refer to enclosed brochure.

Key Features

Industry-Leading Throughput

  • Large capacity F3-S process chamber

  • Simultaneous strip buffering and processing

  • Advanced automation and magazine splitting capabilities

New Product Development

  • Advanced material handling

  • Ability to accommodate increasingly larger strip sizes

  • Sophisticated jam detection

Application Flexibility

  • Plasma chamber effectiveness

  • Configurable process chamber

  • Versatile treatment modes
  • เซมิคอนดักเตอร์, พลังงานแสงอาทิตย์และอิเล็กทรอนิกส์
Nordson Electronics Solutions

Nordson Electronics Solutions is the global leader in plasma processing technology for the semiconductor, printed circuit board (PCB), microelectronics, solar, LED, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea, India and Taiwan.

With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve product reliability and increase production yields.

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