Built upon Nordson Electronics Solutions' patented plasma technology, the FlexTRAK®-SHS is our latest fully automated plasma system incorporating a high-capacity F3-S chamber, to provide high uniformity and increased productivity. The chamber architecture remains the same as the smaller FlexTRAK platform, providing a seamless transition between chambers as production demands more capacity.
W x D x H – Footprint | 2314 x 1935 x 1787 mm (2293 H mm with light tower) 91.1 x 76.2 x 70.5 in (90.3 H in with light tower) |
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Net Weight | 1305 kg (2,871 lbs) | |
Chamber Volume | F3-S chamber: 9.6 liters (585 in³) F3 chamber: 5.5 liters (338 in³) |
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Powered Electrode Dimensions W x D | F3-S chamber: 305 x 610 mm (12 x 24 in) F3 chamber: 305 x 305 mm (12 x 12 in) |
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RF Power: Standard Wattage | F3-S chamber: 1000 W F3 chamber: 600 W |
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RF Power: Frequency | 13.56 MHz | |
Gas Control: Maximum Number of MFCs | 4 | |
For further details, please refer to enclosed brochure. |
Large capacity F3-S process chamber
Simultaneous strip buffering and processing
Advanced material handling
Ability to accommodate increasingly larger strip sizes
Plasma chamber effectiveness
Configurable process chamber
Nordson Electronics Solutions is the global leader in plasma processing technology for the semiconductor, printed circuit board (PCB), microelectronics, solar, LED, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea, India and Taiwan.
With over 20 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve product reliability and increase production yields.